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Micro electro mechanical system (MEMS) technology has shown its bright future in many different fields, especially in space and radio frequency (RF) systems. By using MEMS technology, we can greatly shrink the cost and the footprint of RF circuits since all the off-chip components such as inductors and capacitors can be fabricated and integrated into a whole single chip at one time. Our research is directed by the purpose of developing more powerful RF components. 2.2 MEMS actuators 2.2.1 Electrostatic actuators
2.2.2 Thermal actuators 2.2.3 Other actuators 2.3 Micromachining techniques 2.3.1 Bulk micromachining 2.3.2 Wafer bonding
2.3.3 LIGA 2.3.4 Surface micromachining 2.3.5 Flip chip technique 2.4 Micromachining foundry 3 Two-hot-Arm Horizontal Thermal Actuator 3.1 Introduction 3.2 Electrothermal analysis 3.2.1 Analytical solution. Bidirectional Vertical Thermal Actuators, Mechanical design, Electrothermal analysis, Mechanical analysis, Analytical solution, Simulation results. The schematic view of MEMS chip, The schematic diagram of electrostatic microactuator, The schematic diagram of thermal pneumatic microactuator, the schematic diagram of LIGA process. The analytical result of temperature distribution along the outer and inner hot arms.
Tags : radio frequency rf, micromachining techniques, bulk micromachining, surface micromachining, rf circuits, rf systems, rf components, chip components, analytical solution, mechanical analysis, schematic view, schematic diagram, liga 2, analysis 3, mechanical system
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